GTO Team

Grating Lithography Mask

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DetailsMade by (1)Used in (5)Version history

1 recipe uses this.

Voltage
All5EV1UEV1UIV1UXV1
  • Dimensional Focus Engraving ArrayMakes Diffractor Grating MirrorView recipe
    NC6mB
    UXV
    Duration
    6 s
    Total
    15,099,494,400 EU
    Usage
    125,829,120 EU/t
    Conditions and notes
    • Requires Cleanroom