GTO Team

Grating Lithography Mask

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DetailsMade by (1)Used in (5)Version history

5 recipes use this.

Voltage
All5EV1UEV1UIV1UXV1
  • Dimensional Focus Engraving ArrayMakes Diffractor Grating MirrorView recipe
    NC6mB
    UXV
    Duration
    6 s
    Total
    15,099,494,400 EU
    Usage
    125,829,120 EU/t
    Conditions and notes
    • Requires Cleanroom
  • Laser EngraverMakes Diffractor Grating MirrorView recipe
    NC
    UIV
    Duration
    30 s
    Total
    18,874,368,000 EU
    Usage
    31,457,280 EU/t
    Conditions and notes
    • Requires Cleanroom
  • Precision Laser EngraverMakes Fm WaferView recipe
    NCNCNCNCNCNCNCNC1B
    UEV
    Duration
    140 s
    Total
    22,020,096,000 EU
    Usage
    7,864,320 EU/t
  • DisassemblyTakes apart Grating Lithography MaskView recipe
    EV
    Duration
    10 s
    Total
    384,000 EU
    Usage
    1,920 EU/t
  • Data ScanningMakes Grating Lithography MaskView recipe
    44