GTO Team

Lithography Mask

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DetailsMade by (2)Used in (7)Version history

2 recipes make this.

Voltage
All2HV1EV1
  • Precision AssemblerMakes Lithography MaskView recipe
    6416288mB288mB288mB288mB
    HV
    Duration
    60 s
    Total
    576,000 EU
    Usage
    480 EU/t
    Conditions and notes
    • Requires Sterile Cleanroom
  • DisassemblyTakes apart Grating Lithography MaskView recipe
    EV
    Duration
    10 s
    Total
    384,000 EU
    Usage
    1,920 EU/t