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Grating Lithography Mask

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DetailsMade by (1)Used in (4)Version history

4 recipes use this.

Voltage
All4EV1UEV1UIV1UXV1
  • Dimensional Focus Engraving ArrayMakes Diffractor Grating MirrorView recipe
    6mBRequires CleanroomDuration: 6 secsTotal: 15,099,494,400 EUUsage: 125,829,120 EU/tUXV
  • Laser EngraverMakes Diffractor Grating MirrorView recipe
    Requires CleanroomDuration: 30 secsTotal: 18,874,368,000 EUUsage: 31,457,280 EU/tUIV
  • Precision Laser EngraverMakes Fm WaferView recipe
    1BDuration: 140 secsTotal: 22,020,096,000 EUUsage: 7,864,320 EU/tUEV
  • DisassemblyTakes apart Grating Lithography MaskView recipe
    Duration: 10 secsTotal: 384,000 EUUsage: 1,920 EU/tEV